2020 International Conference on Solid State Devices and Materials

2020 International Conference on Solid State Devices and Materials

2020年9月27日〜9月30日
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International Conference on Solid State Devices and Materials
2020 International Conference on Solid State Devices and Materials

2020 International Conference on Solid State Devices and Materials

2020年9月27日〜9月30日

[A-1-04]Understanding wet annealing effect on phase transition and ferroelectric phase formation for Hf1-xZrxO2 film

〇Shigehisa Shibayama1, Jotaro Nagano1, Mitsuo Sakashita1, Osamu Nakatsuka1,2(1. Nagoya Univ.(Japan), 2. IMaSS, Nagoya Univ.(Japan))
https://doi.org/10.7567/SSDM.2020.A-1-04
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