2020 International Conference on Solid State Devices and Materials

2020 International Conference on Solid State Devices and Materials

2020年9月27日〜9月30日
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International Conference on Solid State Devices and Materials
2020 International Conference on Solid State Devices and Materials

2020 International Conference on Solid State Devices and Materials

2020年9月27日〜9月30日

[A-1-05]Thickness Scaling on Ferroelectric Al0.8Sc0.2N Films

〇Sunglin TSAI1, Takuya Hoshii1, Hitoshi Wakabayashi1, Kazuo Tsutsui1, Kuniyuki Kakushima1(1. Tokyo Inst.of Tech.(Japan))
https://doi.org/10.7567/SSDM.2020.A-1-05
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