2020 International Conference on Solid State Devices and Materials

2020 International Conference on Solid State Devices and Materials

2020年9月27日〜9月30日
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International Conference on Solid State Devices and Materials
2020 International Conference on Solid State Devices and Materials

2020 International Conference on Solid State Devices and Materials

2020年9月27日〜9月30日

[A-5-03]Evaluation of the impact of source/drain epi implementation on logic performance using combined process and circuit simulation

〇Assawer - Soussou1, Tom - Schram2, Kenichi - Miyaguchi2, Ivan - Chakarov3, Bertrand - Parvais2, Joseph - Ervin3(1. COVENTOR(France), 2. IMEC(Belgium), 3. COVENTOR (US)(United States of America))
https://doi.org/10.7567/SSDM.2020.A-5-03
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