2020 International Conference on Solid State Devices and Materials

2020 International Conference on Solid State Devices and Materials

2020年9月27日〜9月30日
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International Conference on Solid State Devices and Materials
2020 International Conference on Solid State Devices and Materials

2020 International Conference on Solid State Devices and Materials

2020年9月27日〜9月30日

[A-5-02]A Triple-Deck CFET Structure with an Integrated SRAM Cell for the 2nm Technology Node and Beyond

〇Bingqi Sun1, Qingpeng Wang2, Shaofeng Yu1(1. Fudan University(China), 2. Coventor, LamResearch Company(United States of America))
https://doi.org/10.7567/SSDM.2020.A-7-04
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