2020 International Conference on Solid State Devices and Materials

2020 International Conference on Solid State Devices and Materials

2020年9月27日〜9月30日
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International Conference on Solid State Devices and Materials
2020 International Conference on Solid State Devices and Materials

2020 International Conference on Solid State Devices and Materials

2020年9月27日〜9月30日

[B-10-02]HfN Multi Charge Trapping Layers for Hf-based MONOS Nonvolatile Memory

〇Shun-ichiro Ohmi1, Yusuke Horiuchi1, Hiroki Morita1, Akio Ihara1, Jooyoung Pyo1(1. Tokyo Tech(Japan))
https://doi.org/10.7567/SSDM.2020.B-10-02
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