Presentation Information

[Th-C3-01]Toward Reliable Depth Analysis of Organic–Inorganic Multilayer Structures by TOF-SIMS

*Shin-ichi Iida1 (1. ULVAC-PHI, Inc. (Japan))

Keywords:

Organic–Inorganic,Ar-GCIB,Hybrid Sputtering,TOF-SIMS,Depth Profiling


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