[We-B6] Novel Electron Microscopy Techniques & Structure Analysis

5:50 PM - 6:10 PM

[We-B6-02] Quantitative Analysis of Resolution Degradation in STEM Images Caused by Multiple Scattering

*Qianyi Geng¹, Kazuhisa Sato^2,3, Jun Yamasaki^3,4 (1. Department of Quantum Information Electronics, The University of Osaka (Japan), 2. Faculty of Engineering, Kyushu University (Japan), 3. Research Center for UHVEM, The University of Osaka (Japan), 4. Institute of Materials and Systems for Sustainability, Nagoya Nniversity (Japan))

Keywords:

Resolution Degradation,Multiple Scattering,Dislocation Image,High-Voltage Electron Microscope