[A1444-4pm] 07. Inorganic Chemistry

1:40 PM - 2:00 PM JST(4:40 AM - 5:00 AM UTC)English

[A1444-4pm-03] Growth-traceable fully vapour-phase organic-inorganic atomic layer deposition system

○Hideaki Matsuo¹, Takuro Hosomi¹, Jiangyang Liu¹, Wataru Tanaka¹, Tsunaki Takahashi¹, Takeshi Yanagida^1,2 (1. Grad. Sch. Eng., The Univ. of Tokyo, 2. IMCE, Kyushu Univ.)

Keywords:

Atomic layer deposition,Quartz crystal microbalance