Presentation Information

9:50 AM - 10:00 AM JST(12:50 AM - 1:00 AM UTC)Japanese

[F1234-1am-03]Effects of the Number of Silicon Atoms on the Formation of Thin Films of Permethyloligosilanes

○Masahiro Kogure¹, Tomohiro Tanaka, Soichiro Kyushin¹ (1. Gunma University)

Permethyloligosilane,Thin Film