[H937-2vn] 02. Theoretical Chemistry, Chemoinformatics, and Computational Chemistry

4:05 PM - 4:15 PM JST(7:05 AM - 7:15 AM UTC)Japanese

[H937-2vn-02] Analysis of crystal growth mechanism at Si(100) and Si(110) surfaces via quantum chemical calculation

○Mana Ishizuka¹, Katsunori Yamaguchi¹, Nilson Kunioshi¹ (1. Waseda Univ)

Keywords:

Chemical Vapor Deposition,Reaction Dynamics,Transition State Theory