Presentation Information

Japanese

[P1-2pm-09]Flow-type LP-ALD process for the preparation of α-Fe₂O₃ thin films

○Mitsuki Takayanagi¹, Yohei Yamane¹, Naoki Osaka¹, Kentarou Mori¹ (1. College of Industrial Technology, Nihon University)

Thin film,Metal oxide,Deposition system