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[MoA4-05]Wafer-Scale Growth of Twin-Free InP Micro-Templates on 2-inch SOI (001) Substrates Using the Lateral ART Method

〇Hiroya Homma1, Hiroki Sugiyama1, Tatsurou Hiraki1, Takuro Fujii1, Tomonari Sato1, Shinji Matsuo1 (1. NTT, Inc. (Japan))

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