Presentation Information

[MoB3-02]Growth Kinetics and In-situ Etching in the Metalorganic Vapor Phase Epitaxy of GeO2

〇Giuditta Cicconi1,2, Matteo Bosi2, Wenshan Chen3, Oliver Bierwagen3, Andrea Baraldi1, Francesco Mezzadri4, Luca Seravalli2, Antonella Parisini1, Roberto Fornari1,2, Piero Mazzolini1,2 (1. Department of Mathematical, Physical and Computer Sciences, Univ. of Parma, Parma (Italy), 2. IMEM-CNR, Parma (Italy), 3. Paul-Drude-Inst. for Solid State Electronics, Berlin (Germany), 4. Department of Chemical, Life and Environmental Sustainability Sciences, Univ. of Parma, Parma (Italy))

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