Presentation Information
[ThA2-04]X-ray Spectroscopic Characterization of Surface Oxidation of ScAlN Thin Films Grown on GaN
〇Hikaru Sasaki1, Akihira Munakata1, Takahito Takeda1, Masaki Kobayashi1, Atsushi Fujimori1, Ryota Yamamoto2, Sawaki Sato2, Atsushi Kobayashi2, Masakazu Sugiyama1, Ryosho Nakane1, Takuya Maeda1 (1. The Univ. of Tokyo (Japan), 2. Tokyo Univ. of Sci. (Japan))
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