Presentation Information
[ThA2-05]Electrical Characterization of ScAlN Thin Films Epitaxially Grown on n-GaN/sapphire Substrates by Sputtering
〇Kosuke Joya1, Sawaki Sato2, Atsushi Kobayashi2, Takuya Maeda1 (1. The Univ. of Tokyo (Japan), 2. Tokyo Univ. of Sci. (Japan))
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