Presentation Information
[TuP3A-09]Optimization of Plasma Etching on 150 mm Indium Phosphide Wafers
〇Tom Simpson1, Jay Burnett2, Adam S. Beachey2, Jacob Mitchell2, Kerry Roberts2, J. Iwan Davies3, Huma Ashraf2, Samuel Shutts1,4 (1. School of Physics and Astronomy, Cardiff Univ. (UK), 2. KLA Corp. (SPTS Division) (UK), 3. IQE plc. (UK), 4. Inst. for Compound Semiconductors, Cardiff Univ. (UK))
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