[TuP3A] Epitaxy and process

[TuP3A-13] Advanced GaN Epitaxy Platform with Integrated Parts Cleaning Chamber for High Throughput Manufacturing

〇Kenichi Eriguchi¹, Mizuki Yamanaka¹, Shun Narita¹, Keitaro Ikejiri¹, Kazutada Ikenaga¹ (1. Taiyo Nippon Sanso Corp. (Japan))

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