Presentation Information
[TuP3A-14]Comparison of Wafer Warpages Caused by Ni-P Films Formed on GaAs(001) and (111) Substrates
〇Koichiro Nishizawa1,2, Ayumu Matsumoto2, Takayuki Hisaka1, Yoshikazu Kawai1, Kaoru Kadoiwa1, Yu Nakamura1, Satoshi Ichikawa3, Kazuyuki Onoe1, Yoshiki Kojima1, Naoki Fukumuro2, Shinji Yae2 (1. Mitsubishi Electric Corp. (Japan), 2. Univ. of Hyogo (Japan), 3. Osaka Univ. (Japan))
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