[TuP3A] Epitaxy and process

[TuP3A-16] Minimized Contact Resistivity to MOVPE-grown p-InGaAs:C

〇Jan Ebbert¹, Hao Zhang¹, Jonathan Abts¹, Fabian van Essen¹, Nils Weimann^1,2 (1. Dept. of Components for High Frequency Electronics, University of Duisburg-Essen (Germany), 2. Center for Nanointegration Duisburg-Essen (CENIDE) (Germany))

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