[TuP3A] Epitaxy and process

[TuP3A-23] Selective Area Metalorganic Chemical Vapor Deposition of InGaAs/InP Quantum Wells Using a Shadow Mask Directly Attached on the Substrate

〇Takumi Yanagimoto¹, Akihiko Kasukawa^2,3, Masakazu Arai¹ (1. Univ. of Miyazaki (Japan), 2. National Taiwan University of Science and Technology (Taiwan), 3. Yushan Fellow, Ministry of Education (Taiwan))

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