Presentation Information
[TuP3C-11]Mist Thermal Oxidation on Si and GaN Surfaces Using Mist-CVD Method
〇Thin Nu Soe1, Ryosuke Hamasuna1, Takumi Hirakura1, Yusui Nakamura1, Zenji Yatabe2 (1. Kumamoto Univ. (Japan), 2. Hokkaido Univ. (Japan))
Password required to view
Comment
To browse or post comments, you must log in.Log in