Presentation Information

[TuP3G-02]Role of Oxygen Supply in Stabilizing Epitaxial β-Ga2O3 Growth on Sapphire Substrates

〇Wei-Chun Chen1, Wei-Lin Wang1, Kun-An Chiu1, Hung-Pin Chen1, Hui-Wen Chang1, Yu-Wei Lin1 (1. National Center for Instrumentation Res., National Inst. of Applied Res. (Taiwan))

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