[TuP3G] Oxide Materials & Devices

[TuP3G-04] Molecular Beam Epitaxy of (-201) β-Ga₂O₃ and (002) κ-Ga₂O₃ on AlN

〇Andy Séguret^1,2, Julien Bosch¹, Marty Volant^2,3, Ilyass Jellal^1,2, Hervé Roussel², Fabien Jourdan¹, Yann Genuist¹, Eirini Sarigiannidou², Hanako Okuno³, Vincent Consonni², Eva Monroy¹ (1. Univ. Grenoble-Alpes, CEA, Grenoble INP, IRIG, PHELIQS, 38000 Grenoble (France), 2. Univ. Grenoble Alpes, CNRS, Grenoble INP, LMGP, 38000 Grenoble (France), 3. Univ. Grenoble-Alpes, CEA, Grenoble INP, IRIG, MEM, 38000 Grenoble (France))

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