[14] Session 14 (B. Inorganic Materials and Devices for Electronics)

2:45 PM - 3:00 PM JST(5:45 AM - 6:00 AM UTC)

[14-02] Densification of polysilazane under 172 nm VUV light at varying light intensity and their application to high-performance moisture barriers

*Luyang Song¹, He Sun¹, Yoshiyuki Suzuri¹ (1. Yamagata Univ. (Japan))

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