Presentation Information
[P2-01]Comparison of amino- and sulfate- terminated self-assembled monolayers for Cu/porous low-k dielectrics integration
*Yi-Lung Cheng1, Hao-Wei Zhang1, Zhong-Chen Zhang1, Po-Yu Tseng1, Yen-Jui Chen1, Zheng-Yao Hong1
(1. National Chi-Nan Univ. (Taiwan))
(1. National Chi-Nan Univ. (Taiwan))