Presentation Information
[P2-27]Effect of gas flow rate ratio in fabrication of nanocrystalline silicon/silicon oxide composite films on the density of nanocrystalline silicon
*Kaori Takagi1, Asaki Arata2, Yasuyoshi Kurokawa2, Atsushi Masuda1, Noritaka Usami2, Kazuhiro Gotoh1,2 (1. Niigata Univ. (Japan), 2. Nagoya Univ. (Japan))