[C-11] シリコン材料・デバイス

11:30 AM - 11:45 AM JST(2:30 AM - 2:45 AM UTC)

[C-11-01] Influences of Substrate on Heavy-Ion Irradiation induced Current in SOI MOSFET

○Masato Arakaki¹, Yoshihiro Takahashi¹ (1. Nihon Univ.)

Keywords:

Irradiation Effects,SOI-MOSFET,Heavy-Ion Irradiation induced Current