Presentation Information
[C-13-01]The improvement of device performance of vertical polyimide capacitive-type humidity sensors by CNT gas permeable electrodes and hydrophobic underlayer for stable, ultra-fast response
○Eiji Itoh1, Jotaro Iguchi1, Aruga Yasuhiro1 (1. Shinshu University)
Keywords:
polyimide,fluorinated,carbon nanotube,capacitive-type humidity sensor