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[C-13-01]The improvement of device performance of vertical polyimide capacitive-type humidity sensors by CNT gas permeable electrodes and hydrophobic underlayer for stable, ultra-fast response

○Eiji Itoh1, Jotaro Iguchi1, Aruga Yasuhiro1 (1. Shinshu University)
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Keywords:

polyimide,fluorinated,carbon nanotube,capacitive-type humidity sensor