[CI-2] インフォマティクス技術の半導体デバイス・プロセス応用

2:20 PM - 2:50 PM JST(5:20 AM - 5:50 AM UTC)

[CI-2-02] Strategies for Utilizing Process Informatics in Semiconductor Manufacturing Processes

○Masaki Takaishi¹ (1. Aixtal)

Keywords:

Process Informatics,Semiconductor,Optimization,Machine learning