General Conference of the Institute of Electronics, Information and Communication Engineers
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Presentation Information

10:45 AM - 11:00 AM JST(1:45 AM - 2:00 AM UTC)

[C-10-02](Invited Presentation) Control and application of contactless photoelectrochemical (CL-PEC) etching for AlGaN/GaN heterostructures

〇Yugo Oki1, Naoki Shiozawa1, Tokachi Katsumata1, Takuya Togashi1, Taketomo Sato1 (1. Research Center for Integrated Quantum Electronics, Hokkaido University)

Keywords:

GaN,AlGaN,hetero-structure,photoelectrochemical (PEC) etching

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