[B-9] Energy Engineering in Electronics and Communications

3:45 PM - 4:00 PM JST(6:45 AM - 7:00 AM UTC)Candidate for Academic Incentive AwardCareer Explorer

[B-9-08] Special Waveform RF Power Supply Circuit for Ultra-Fine Etching of Semiconductor Wafers

◎△Mizuki Kawazu¹, Yuichi Ishihama¹, Tomohiro Furusato¹, Yoichi Ishizuka¹ (1. Graduate School of Integrated Science and Technology, Nagasaki University)

Keywords:

Power Circuit,Plasma