General Conference of the Institute of Electronics, Information and Communication Engineers
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Presentation Information

10:15 AM - 10:30 AM JST(1:15 AM - 1:30 AM UTC)

[C-6-02]Thermal stability ZrNx films of Cu/ZrNx/SiO2/Si stacked structure

〇Masaru Sato1, Mayumi B. Takeyama1 (1. Kitami Institute of Technology)

Keywords:

LSI,interconnect

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