General Conference of the Institute of Electronics, Information and Communication Engineers
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Presentation Information

10:45 AM - 11:00 AM JST(1:45 AM - 2:00 AM UTC)Candidate for Academic Incentive AwardCareer Explorer

[C-6-04]Enhancement of the relative permittivity of amorphous carbon thin films by TiO2 doping

◎△Keijiro Aoki1, Hiroyasu Ishikawa1 (1. Shibaura Institute of Technology)

Keywords:

amorphous carbon,titanium oxide,relative permittivity,thin film

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