Presentation Information

[CI-1-04]Silicon Nitride Interferometric Devices for Nonvolatile and Reversible Phase Modulation

〇Yuriko Maegami1, Guangwei Cong1, Rai Kou1, Toshihiro Narushima1, Tai Tsuchizawa1, Hitoshi Kawashima1, Noritsugu Yamamoto1, Koji Yamada1 (1. AIST)

Keywords:

silicon nitride,dangling bond,nonvolatile,Mach-Zehnder interferometer