[NNS/AS-P-001] Novel Nitride Semiconductors and their Functional Revolution P1 / ASPIRE P1

[NNS-P-1-03] Automated Pathway Exploration of Gas-Phase Reaction in AlN Metalorganic Vapor Phase Epitaxy: Initial Decomposition Process of Trimethylaluminum

*Naho Sato¹, Kanami Sugiyama², Akira Kusaba^1,3 (1. Kyushu Univ., 2. Kyoto Univ., 3. Nagoya Univ.)