[NNS/AS-P-001] Novel Nitride Semiconductors and their Functional Revolution P1 / ASPIRE P1

[NNS-P-1-05] Addressing Oxidation and Diffusion Challenges in shallow p-GaN Contacts via Mg/SiNx Bilayer Annealing

*Haitao Wang¹, Jia Wang^1,2, Amano Hiroshi^1,2 (1. Institute of Materials and Systems for Sustainability, 2. Institute for Advanced Research)