Poster

[OS07-P1-01] Fabrication of a Single Slit for Space UV Spectroscopy using Si MicromachiningDevelopment of a Fabrication Process Integrating Custom-Designed Wet Etching and DRIE

*Itsuki Nagase¹, Yuki Ashikari¹, Tatsuya Sakamoto¹, Biao Zhao², Chiemi Oka¹, Ryoichi Koga³, Yasuhiro Hirahara², Seiichi Hata¹ (1. Department of Micro-Nano Mechanical Science and Engineering, Nagoya University, Nagoya, Japan, 2. Department of Earth and Environmental Sciences, Graduate School of Environmental Studies, Nagoya University, Nagoya, Japan, 3. Graduate School of Data Science, Nagoya City University, Nagoya, Japan)

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