Session Details
Poster
Tue. Nov 17, 2026 3:30 PM - 5:00 PM JST
Tue. Nov 17, 2026 6:30 AM - 8:00 AM UTC
Tue. Nov 17, 2026 6:30 AM - 8:00 AM UTC
Poster1-07 (1002)
[OS07-P1-01]Fabrication of a Single Slit for Space UV Spectroscopy using Si MicromachiningDevelopment of a Fabrication Process Integrating Custom-Designed Wet Etching and DRIE
*Itsuki Nagase1, Yuki Ashikari1, Tatsuya Sakamoto1, Biao Zhao2, Chiemi Oka1, Ryoichi Koga3, Yasuhiro Hirahara2, Seiichi Hata1 (1. Department of Micro-Nano Mechanical Science and Engineering, Nagoya University, Nagoya, Japan, 2. Department of Earth and Environmental Sciences, Graduate School of Environmental Studies, Nagoya University, Nagoya, Japan, 3. Graduate School of Data Science, Nagoya City University, Nagoya, Japan)