[Th-P] 2D matrials

[Th-P-03] CFD-Based Analysis and Experimental Validation of WSe2 Deposition in Chemical Vapor Deposition

〇Hua-Lin Chen¹, Ting-En Su² (1. National Center for Instrumentation Research, NIAR (Taiwan), 2. Feng Chia University (Taiwan))

This study combines CFD simulations and PGA to optimize monolayer WSe₂ growth. We demonstrate that stable fluid fields are essential for uniform WO₂(OH)₂ transport, while 4-hour PGA significantly enhances crystallinity and grain size up to 105 nm.