[Th-P1-G] Advanced Epitaxy & Related Technology

2:00 PM - 2:30 PM JST(5:00 AM - 5:30 AM UTC)

[Th-P1-G-01 (Invited)] Machine-Learning enabled acceleration of growth simulations

Daniele Lanzoni³, Andrea Fantasia¹, Fabrizio Rovaris¹, Roberto Bergamaschini¹, Olivier Pierre-Louis², 〇Francesco Montalenti¹ (1. University of Milano Bicocca (Italy), 2. Université Lyon (France), 3. Tech. Univ. Dresden (Germany))

We discuss how machine learning techniques can speed-up growth simulations tackling the temporal evolutiom of a film morphology. Examples at both the continuum and the atomic level are given.