[Tu-A1-H] Device physics in nitrides

10:15 AM - 10:30 AM JST(1:15 AM - 1:30 AM UTC)

[Tu-A1-H-05] Atomically Smooth Surfaces with Linearly Aligned Atomic Steps in AlGaN Grown on Sputtered AlN Template with Reduced Compressive Strain

〇Yuto Matsubara¹, Koki Fujii¹, Yusuke Takayanagi¹, Yukiya Hayashi¹, Soki Shimizu¹, Yuki Kuwahara¹, Soichiro Iseki¹, Kota Matsuo¹, Yuusuke Takashima^1,2, Yoshiki Naoi^1,2, Ibuki Taniuchi³, Shohei Nakamura³, Atsushi Maeoka³, Atsushi Osawa³, Shigeru Takatsuji³, Takahiro Kimura³, Kentaro Nagamatsu^1,2,4 (1. Tokushima University (Japan), 2. pLED, Tokushima University (Japan), 3. SCREEN Holdings Co., Ltd. (Japan), 4. IPHF, Tokushima University (Japan))

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