Presentation Information
[Tu-P-24]Interpretable distillation of self-driving sputter epitaxy into growth rules for β-Ga2O3
〇Yuki K. Wakabayashi1, Yui Ogawa1, Franz Benedict Romero1, Takuma Otsuka2, Yoshitaka Taniyasu1 (1. Basic Research Laboratories, NTT, Inc. (Japan), 2. Communication Science Laboratories, NTT, Inc. (Japan))