[Tu-P] Wide-bandgap semiconductors and devices

[Tu-P-25] Self-driving sputtering epitaxy of β-Ga₂O₃

〇Yuki K. Wakabayashi¹, Yui Ogawa¹, Franz Benedict Romero^1,2, Takuma Otsuka², Yoshitaka Taniyasu¹ (1. Basic Research Laboratories, NTT, Inc. (Japan), 2. Communication Science Laboratories, NTT, Inc. (Japan))

Password required to view