Presentation Information
[Tu-P-31]Conductivity Evolution in AZO Thin Films Deposited at Short Target-Substrate Distances
〇Kamila Strycharz1, Tomasz Wojtowicz2, Marcin Klepka3, Anna Wolska3, Zsolt Fogarassy4, Rafał Zybała1, Michał Adam Borysiewicz1 (1. Łukasiewicz Research Network – Institute of Microelectronics and Photonics, Warsaw, Poland (Poland), 2. International Research Centre MagTop, Institute of Physics, Polish Academy of Sciences (Poland), 3. Institute of Physics, Polish Academy of Sciences (Poland), 4. Institute of Technical Physics and Materials Science, HUN-REN Centre for Energy Research (Hungary))
In our work, we investigate a time-dependent conductivity rise of sputtered Al:ZnO films stored under various atmospheres. Our results reveal different origins of conductivity change, emphasizing the influence of deposition conditions, hydrogen doping, oxygen vacancies, and structural defects on the films electrical properties.