[Tu-P] Wide-bandgap semiconductors and devices

[Tu-P-33] Supression of Wurtzite Structure in Rocksalt-structured MgZnO Films by Mist CVD Using Modified Precursor Supply Method

〇Kyosuke Tanaka¹, Kotaro Ogawa¹, Sanshiro Nakashima¹, Tomohiro Yamaguchi¹, Tohru Honda¹, Takeyoshi Onuma¹ (1. Kogakuin Univ. (Japan))

Rocksalt (RS) structured MgZnO films in the metastable phase composition range were grown using mist chemical vapor phase deposition method. Modification for thermal environment significantly suppressed wurtzite phase inclusion, and increased emission intensity originated from RS phase.