Presentation Information
[Tu-P-39]Piezoresistive-Mode Operation of MEMS Bolometers Using n-type Modulation-Doped AlGaAs/GaAs Heterostructures
〇Kazuhiro Takahashi1,2,3, Naomi Nagai3, Atsushi Nakanishi1, Kazuyuki Kuroyama3, Kazuhiko Hirakawa2,3, Ya Zhang3 (1. Hamamatsu Photonics K.K. (Japan), 2. Tokyo univ. of Agriculture and Tech. (Japan), 3. Inst. of Indus. Sci., The Univ. of Tokyo (Japan))