[Tu-P2-G] Nanowire Materials

5:00 PM - 5:15 PM JST(8:00 AM - 8:15 AM UTC)

[Tu-P2-G-04] Optical Metrology of Semiconductor Nanowires Beyond the Diffraction Limit using High-Throughput Correlated Microscopy

〇Greg Chu¹, Zeinab Tirandaz¹, Ralf Mouthaan², Hoe Tan³, Chennupati Jagadish³, Hannah Joyce¹, Jack Alexander-Webber¹ (1. University of Cambridge (UK), 2. University of Adelaide (Australia), 3. The Australian National University (Australia))

By correlating optical images with SEM images, we are able to train a machine learning model that can predict a nanowire diameter from optical images alone within 5% (<13nm) mean-relative error, reducing cost, increasing throughput, without compromising accuracy.