[Tu-P2-H] SiC, IGZO, Ga2O3, and diamond

5:15 PM - 5:30 PM JST(8:15 AM - 8:30 AM UTC)

[Tu-P2-H-06] Development of an Atomic Layer Etching for Diamond Nanophotonics

Marine Régnier^1,2,3, Amadeusz Dydnianski^3,4, Jungwon Kim¹, Aboulaye Traore⁷, 〇Jacek Kasprzak^1,3,4, Sébastian Pairis¹, Tokuyuki Teraji⁶, Etienne Gheereart^1,2,3, Mareline Bonvalot^2,3,5 (1. Université Grenoble Alpes, CNRS, Grenoble INP, Institut Néel, (France), 2. University of Tsukuba (Japan), 3. Japanese-French Laboratory for Semiconductor Physics and Technology J-FAST, CNRS, Univ. Grenoble Alpes, University of Tsukuba, Japan (Japan), 4. University of Warsaw (Poland), 5. Université Grenoble Alpes, CNRS, Grenoble INP, LTM (France), 6. NIMS (Japan), 7. LSPM, CNRS, Université Sorbonne Paris Nord, (France))

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