Presentation Information

[We-P-09]Study on Source Concentration Dependence of Mist CVD Growth of β-Ga2O3 Films Using Gallium Oxide Polycrystalline Powder

〇Sota Yamanaka1, Shohei Abe1, Tomohiro Yamaguchi1, Tohru Honda1, Khohei Sasaki2, Akito Kuramata2, Takeyoshi Onuma1 (1. Kogakuin Univ. (Japan), 2. Novel Crystal Technology, Inc. (Japan))

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