Presentation Information
[We-P-10]Control of Al-Doping Concentration in MgO Films Grown by Mist CVD Using Modified Precursor Supply Method
〇Sanshiro Nakashima1, Kotaro Ogawa1, Kyosuke Tanaka1, Takumi Hosaka1, Tomohiro Yamaguchi1, Toru Honda1, Takeyoshi Onuma1 (1. Kogakuin Univ. (Japan))
